sulfur hexafluoride

Alias name
  • SF6
  • sulfur hexafluoride <ChemicalName>
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Inquiry of this product
Electronic Chemicals Division, Specialty Gases Group

About the product

A high quality gas for semiconductor raw material, used for etching and cleaning.

Inquiry of this product
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781

The data shown below are representative figures. They are not guaranteed values.